Journal of Micro-Nanolithography MEMS and MOEMS

The Journal of Micro-Nanolithography MEMS and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

《微纳米光刻机MEMS和MOEMS杂志》（JM3）发表了有关光刻、制造、包装和集成技术的科学、发展和实践的论文，以满足电子、MEMS、MOEMS和光子学行业的需要。这类装置的范围很广，包括生物医学微装置、微流体、传感器和执行器、自适应光学和数字微镜。范围广泛，有助于促进期刊服务的社区之间的协同作用和利益。